JPH0718963Y2 - 光学式表面粗さ測定装置 - Google Patents

光学式表面粗さ測定装置

Info

Publication number
JPH0718963Y2
JPH0718963Y2 JP1989056385U JP5638589U JPH0718963Y2 JP H0718963 Y2 JPH0718963 Y2 JP H0718963Y2 JP 1989056385 U JP1989056385 U JP 1989056385U JP 5638589 U JP5638589 U JP 5638589U JP H0718963 Y2 JPH0718963 Y2 JP H0718963Y2
Authority
JP
Japan
Prior art keywords
light
polarized light
linearly polarized
measured
surface roughness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989056385U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02146306U (en]
Inventor
元人 日野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Brother Industries Ltd
Original Assignee
Brother Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Brother Industries Ltd filed Critical Brother Industries Ltd
Priority to JP1989056385U priority Critical patent/JPH0718963Y2/ja
Priority to US07/518,432 priority patent/US5051575A/en
Publication of JPH02146306U publication Critical patent/JPH02146306U/ja
Application granted granted Critical
Publication of JPH0718963Y2 publication Critical patent/JPH0718963Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP1989056385U 1989-05-16 1989-05-16 光学式表面粗さ測定装置 Expired - Lifetime JPH0718963Y2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1989056385U JPH0718963Y2 (ja) 1989-05-16 1989-05-16 光学式表面粗さ測定装置
US07/518,432 US5051575A (en) 1989-05-16 1990-05-03 Optical surface roughness measuring apparatus using double-focus lens for producing parallel and converged beams for measurement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989056385U JPH0718963Y2 (ja) 1989-05-16 1989-05-16 光学式表面粗さ測定装置

Publications (2)

Publication Number Publication Date
JPH02146306U JPH02146306U (en]) 1990-12-12
JPH0718963Y2 true JPH0718963Y2 (ja) 1995-05-01

Family

ID=13025784

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989056385U Expired - Lifetime JPH0718963Y2 (ja) 1989-05-16 1989-05-16 光学式表面粗さ測定装置

Country Status (2)

Country Link
US (1) US5051575A (en])
JP (1) JPH0718963Y2 (en])

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2798185B2 (ja) * 1990-07-26 1998-09-17 キヤノン株式会社 光磁気式情報再生装置用光学ヘッド
US5686731A (en) * 1996-04-30 1997-11-11 Ati Systems, Inc. Multi-parameter scanning system with moveable field mask
DE10016377B4 (de) * 2000-04-04 2009-01-08 Leica Microsystems Cms Gmbh Vorrichtung zum Vereinigen von Licht
US7402773B2 (en) * 2005-05-24 2008-07-22 Disco Corporation Laser beam processing machine
US8075274B2 (en) * 2009-05-13 2011-12-13 Hamilton Sundstrand Corporation Reinforced composite fan blade
JP4611431B1 (ja) * 2009-06-29 2011-01-12 西進商事株式会社 レーザー照射装置及びレーザー加工方法
CN108317975B (zh) * 2018-01-30 2024-04-09 广州肖宁道路工程技术研究事务所有限公司 路面抗滑纹理测试装置及其扫描机构
CN119223166B (zh) * 2024-12-04 2025-03-14 杭州泓芯微半导体有限公司 轨道式端板尺寸跳动检测装置

Also Published As

Publication number Publication date
JPH02146306U (en]) 1990-12-12
US5051575A (en) 1991-09-24

Similar Documents

Publication Publication Date Title
US5469259A (en) Inspection interferometer with scanning autofocus, and phase angle control features
CN101666630B (zh) 一种基于平行平晶分偏振光束及相移干涉术的精密晶圆检测方法和装置
JPS629211A (ja) 光学測定装置
JPH0718963Y2 (ja) 光学式表面粗さ測定装置
US4905311A (en) Optical surface roughness measuring apparatus with polarization detection
JPS59116007A (ja) 表面の測定方法
JPS63144206A (ja) 物体位置の測定方法
JPH0256604B2 (en])
JP2001264036A (ja) 面形状測定装置及び測定方法
JPH0742087Y2 (ja) 光学式表面粗さ測定装置
JP2514577Y2 (ja) 光学式表面粗さ測定装置
JP2501738Y2 (ja) 光学式表面粗さ測定装置
JPH0221203A (ja) 位相差検出装置
JPH0579834A (ja) 原子間力顕微鏡
JP2949847B2 (ja) 光学式表面粗さ測定装置
JPS63148106A (ja) 物体位置測定装置
JPH0465612A (ja) 光学式表面粗さ測定方法および装置
JPS63204182A (ja) レ−ザドツプラ速度測定方法および装置
JP2011099914A (ja) 偏光光学素子
JPH01280205A (ja) レーザ走査型表面粗さ測定装置
JPH10274513A (ja) 表面形状測定方法及び表面形状測定器
JPH0465614A (ja) 光学式表面粗さ測定装置
JP3393910B2 (ja) 表面形状測定方法
JPH0465601A (ja) 光ヘテロダイン干渉測定装置
JP2890762B2 (ja) 除振式光集積型表面形状測定装置

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term